Configured As Follows:
Basic FP200A Automatic Probing System
Main Control System
Hard Drive Disk
3 1/2 Floppy Disk Drive
Head Stage
First Cassette Loader for 25 Wafers(5-8 inch Wafers)
Manual WAfer Inspection Transfer Unit
Dual Robotic Wafer Transport Arms
Pre Alignment Stage Unit
Capacitive Non-Contact Displacement Sensor
Advanced Wafer Alignment Unit
Dual (X and Y ) Moire Scales
High Rigidity Z Stage
Color LCD Control Panel with Touch Panel Switches
Alarm Lamp Pole
