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| Wafer Inspection and Metrology Equipment | ||
| Model | Description | Ref # | |
| Kensington | Scope | MET8 | |
| Schlumberger IDS P2X | MET20 | ||
| Schlumberger IDS 10000 Plus | E Beam Tester | MET19 | |
| Tencor Film Thickness | TF1 Model 171670 Film Thickness Measurement System | MET11 | |