Configured As Follows:
Serial DR 1104
Manufactured Oct 1990
Wafer Size 200
Maximum Spindle Speed 60,000 rpm
Power Requirement is AC200V # Phase 5KVA
Manufacturing # DP1104
The vision system is an alignment system pattern matching referenced to
the target pattern by the CCD camera.
The monocular microscope is displayed on the monitor x 300
|
