JMC currently has a 
KLA 8100 Fully Automated CD-SEM
(Scanning Electron Microscope) for sale.
Ref # MET 1

Toolcode Ref: MET001
Mainframe Style:    Common    
Install Date:    1997-1998 (also new system avail)   
Wafer Size:    200mm                           
System Description:Sub 0.35 micron metrology and imaging of lines/spaces and contact   holes
Back-scattered and secondary electron mode of operation   

System Configuration:

                SMIF 3 Indexer Option  
                Dry Scroll Pump Package
                Power Conditioning Unit
                External Control Console
                GEM/SECS II Communication
                Small Format Image and Data Thermal Printer