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| Wafer Inspection and Metrology Equipment | ||
| Model | Description | Ref # | |
| Kensington | Scope | MET8 | |
| KLA 2606 | Review Station | MET16 | |
| KLA 8100 | CD-SEM Scanning Electron Microscope 200mm | MET1 | |
| Seiko SMI | 9800 SEM Scanning Electron Microscope | MET7 | |
| Tencor Film Thickness | TF1 Model 171670 Film Thickness Measurement System | MET11 | |
| Prometrix Film Thickness 500 |
Film Thickness Measurement
System FT 500 |
MET8 | |